Hybrid Ion Milling is a precision sample preparation technique used to produce high-quality cross-sectional and flat surfaces for advanced imaging and analysis. It utilizes a focused ion beam to gently remove material, minimizing mechanical damage and preserving microstructural integrity.
Cross section milling reveals internal layers and interfaces, while flat milling removes surface deformation and polishing artifacts. This method is especially useful for fragile, heterogeneous, or heat-sensitive samples, and is commonly used prior to SEM, EBSD, and EDS analysis.
